홈 > 테스트웨이퍼 > 박막증착웨이퍼| Blanket Wafer | Thin Film Type | Thin Film | Method |
|---|---|---|---|
| Oxide | Th-SiO2 | Dry, Wet | |
| Low-Particle Th-SiO2 | Dry, Wet | ||
| PE-SiO2 | PE-CVD | ||
| PE-TEOS | PE-CVD | ||
| LP-CVD TEOS | LP-CVD | ||
| HDP | PE-CVD | ||
| USG | PE-CVD | ||
| PSG | CVD | ||
| BPSG | CVD | ||
| RTO | Anneal | ||
| Poly Silicon | Doped / non Doped | LP-CVD | |
| Amorphous | |||
| Nitride | LP-CVD SIN | LP-CVD | |
| PE-CVD SIN | PE-CVD | ||
| P-SiON | CVD | ||
| Photo Resists | I-Line | Spin Coater | |
| KrF | Spin Coater | ||
| ArF | Spin Coater | ||
| Low-K | BD | CVD | |
| BDⅡX | CVD | ||
| BDⅢ | CVD | ||
| AURORA | CVD | ||
| CORAL | CVD | ||
| Metal | Ta , TaN | Sputter | |
| Ti , TiN | Sputter | ||
| W | Sputter , CVD | ||
| Cr | Sputter | ||
| Cu | Sputter | ||
| Al , Al-Cu , Al-Si | Sputter | ||
| Pt | Sputter | ||
| Ni | Sputter | ||
| Ru | Sputter | ||
| Pd | Sputter | ||
| Au | Sputter | ||
| Co | Sputter | ||
| etc | Sputter |
